Capacitor having copper electrodes and diffusion barrier layers

Details Capacitor having copper electrodes and diffusion barrier layers Capacitor having copper electrodes and diffusion barrier layers

2005-02-15

2005-02-15

Reichard, Dean A. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S321200, C361S321500, C361S306100, C361S306300, C361S311000, C361S320000, C438S396000, C438S397000

Reexamination Certificate

active

06856501

ABSTRACT:
A capacitor has a couple of electrodes with a dielectric placed therebetween. At least one of the electrodes is made of copper, and barriers for preventing the diffusion of copper into the dielectric are provided between the dielectric and the copper electrode, respectively.

REFERENCES:
patent: 5661334 (1997-08-01), Akram
patent: 5976928 (1999-11-01), Kirlin et al.
patent: 6008083 (1999-12-01), Brabazon et al.
patent: 6180976 (2001-01-01), Roy
patent: 6184551 (2001-02-01), Lee et al.
patent: 6207552 (2001-03-01), Wang et al.
patent: 6320244 (2001-11-01), Alers et al.
patent: 6346454 (2002-02-01), Sung et al.
patent: 6426249 (2002-07-01), Geffken et al.

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