Capacitor having a ruthenate electrode and method of formation

Details Capacitor having a ruthenate electrode and method of formation Capacitor having a ruthenate electrode and method of formation

1992-04-29

1993-02-09

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, H01G 410, H01G 700

Patent

active

051856891

ABSTRACT:
A capacitor (11) is formed overlying a dielectric layer (34). A conductive layer (36) is formed overlying the dielectric layer (34). An optional barrier layer (16) is formed to electrically connect and isolate the conductive layer (36) from a first electrode region (20) which has a ruthenate portion. A dielectric layer (22) is formed overlying the first ruthenate electrode region (20) to form a capacitor dielectric. A second electrode region (24) is formed overlying the dielectric layer (22). An optional barrier layer (28) is formed overlying the electrode region (24). A conductive layer (32) is formed overlying the optional barrier layer (28) and makes electric contact to the electrode region (24). A dielectric layer (30) is formed to electrically isolate the capacitor (11).

REFERENCES:
patent: 4925538 (1990-05-01), Matsumoto et al.
patent: 5003428 (1991-03-01), Shepherd
patent: 5005102 (1991-04-01), Larson
patent: 5122923 (1992-06-01), Matsubara et al.

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