Capacitor constructions

Details Capacitor constructions Capacitor constructions

1996-01-03

1998-06-23

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613215, 361305, 361313, 257306, 257310, H01G 406

Patent

active

057711500

ABSTRACT:
A capacitor construction includes, i) a dense mass of electrically insulative oxide; ii) an electrically conductive inner capacitor plate overlying and contacting the electrically insulative oxide mass; iii) a capacitor dielectric layer overlying the inner capacitor plate and oxide mass, the capacitor dielectric layer comprising a nitride; iv) an electrically conductive outer capacitor plate overlying the capacitor dielectric layer; and v) the dense mass of electrically insulative oxide contacting the inner capacitor plate being characterized by a wet etch rate of less than or equal to about 75 Angstroms/minute in a 100:1 by volume H.sub.2 O:HF solution.

REFERENCES:
patent: 5142438 (1992-08-01), Reinberg et al.
patent: 5286674 (1994-02-01), Roth et al.
patent: 5416041 (1995-05-01), Schwalke
Kaga, T. et al., "A 0.29-vm.sup.2 MIM-CROWN Cell and Process Technologies for 1-Gigabit DRAMs", IEDM 1994, pp. 927-929.

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