Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1996-07-25
1998-09-15
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
257306, 501134, 501136, 501137, 361303, 3613211, 3613213, 3613215, H01G 406
Patent
active
058088547
ABSTRACT:
A capacitor apparatus includes, a) a substrate having a node; b) an inner capacitor plate in ohmic electrical connection with the substrate node; c) an outer capacitor plate; d) a capacitor dielectric layer interposed between inner and outer capacitor plates; e) an electrically conductive reaction barrier layer interposed between the substrate node and the inner capacitor plate, the reaction barrier layer having outer lateral edges which are recessed beneath the inner capacitor plate; and f) oxidation barrier blocks being received over the recessed outer lateral edges beneath the inner capacitor plate. Methods of forming such a capacitor are also disclosed.
REFERENCES:
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patent: 5371700 (1994-12-01), Hamada
patent: 5381302 (1995-01-01), Sandhu et al.
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patent: 5459345 (1995-10-01), Okudaira et al.
patent: 5554866 (1996-09-01), Nishioka et al.
patent: 5559666 (1996-09-01), Figura et al.
patent: 5567964 (1996-10-01), Kashihara et al.
Figura Thomas A.
Schuele Paul J.
Ledynh Bot L.
Micro)n Technology, Inc.
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