Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1997-10-07
1998-12-29
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361303, 361305, 361311, 361313, 3613211, 3613214, 257306, 257310, H01G 406, H01G 4005, H01G 4008
Patent
active
058547347
ABSTRACT:
A method of forming a capacitor includes, a) providing a node to which electrical connection to a capacitor is to be made; b) providing a first electrically conductive capacitor plate over the node, the capacitor plate comprising conductively doped polysilicon; c) providing a predominately amorphous electrically conductive layer over the first capacitor plate; d) providing a capacitor dielectric layer over the amorphous electrically conductive layer; and e) providing a second electrically conductive capacitor plate over the capacitor dielectric layer. A capacitor construction is also disclosed. The invention has greatest utility where the polysilicon layer covered with the amorphous conductive layer is a roughened outer layer, such as provided with hemispherical grain polysilicon. The preferred amorphous electrically conductive layer is metal organic chemical vapor deposited TiC.sub.x N.sub.y O.sub.z, where "x" is in the range of from 0.01 to 0.5, and "y" is in the range of from 0.99 to 0.5, and "z" is in the range of from 0 to 0.3, with the sum of "x", "y" and "z" equalling about 1.0; and the step of metal organic chemical vapor depositing TiC.sub.x N.sub.y O.sub.z comprises utilizing a gaseous titanium organometallic precursor of the formula Ti(NR.sub.2).sub.4, where R is selected from the group consisting of H and a carbon containing radical, and utilizing deposition conditions of from 200.degree. C. to 600.degree. C. and from 0.1 to 100 Torr.
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Brown Kris K.
Sandhu Gurtej S.
Ledynh Bot L.
Micro)n Technology, Inc.
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