Capacitor circuit structure for determining overlay error

Details Capacitor circuit structure for determining overlay error Capacitor circuit structure for determining overlay error

1999-06-14

2000-11-07

Tsai, Jey

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having substrate registration feature

438975, H01L 2176

Patent

active

061436216

ABSTRACT:
A structure suitable for aligning two patterned conductive layers that are separated by a dielectric layer is described. Included in the lower pattern is a square and, as part of the upper pattern, four T-shaped capacitor electrodes are provided. The latter are positioned so that, when the alignment is exact, they all overlap the square by the same amount. Thus, under conditions of exact alignment, the capacitance value measured between any one of the top electrodes and the square will be the same for all electrodes. When, however, misalignment occurs, the degree of overlap will change, increasing on one side of the square while decreasing at the opposite side. In this way a comparison of measured capacitance values between electrodes located on opposing sides of the square will indicate whether, and what extent, misalignment has occurred.

REFERENCES:
patent: 4538105 (1985-08-01), Ausschnitt
patent: 4647850 (1987-03-01), Henderson et al.
patent: 5617340 (1997-04-01), Cresswell et al.
patent: 5699282 (1997-12-01), Allen et al.
patent: 5879866 (1999-09-01), Starikov et al.
patent: 5959325 (1999-09-01), Adair et al.
D.S. Perloff, "A Van Der Pauw Resistor Structure for Determining Mask Superposition Errors on Semiconductor Slices" in Solid State Electronics, Aug. 21, 1978, pp. 1013-1018.

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