Capacitor center of area sensitivity in angular motion micro-ele

Details Capacitor center of area sensitivity in angular motion micro-ele Capacitor center of area sensitivity in angular motion micro-ele

1998-08-28

1999-12-14

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73 138, G01P 15125, G01P 2100

Patent

active

060002875

ABSTRACT:
A method is provided that may be used to design a family of capacitive microaccelerometers with different members of the family having different sensitivities to acceleration without having to make a radical design change to the basic construction. The microaccelerometer is a capacitively sensed angular motion micro-electromechanical system. The microaccelerometer includes a stationary plate electrode and a movable plate electrode substantially parallel with the stationary plate electrode. The movable plate electrode rotates through a dielectric fluid about an axis of rotation parallel to the stationary plate electrode in response to acceleration. The method includes determining the desired sensitivity and changing the stationary plate center of area relative to the movable plate so as to obtain the desired sensitivity.

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