Capacitor anode formed of metallic columns on a substrate

Details Capacitor anode formed of metallic columns on a substrate Capacitor anode formed of metallic columns on a substrate

2006-12-12

2006-12-12

Thomas, Eric W. (Department: 2831)

Electricity: electrical systems and devices

Electrolytic systems or devices

Solid electrolytic capacitor

C361S532000

Reexamination Certificate

active

07149076

ABSTRACT:
Capacitor anodes that include metallic columns formed on a substrate so as to form a porous microstructure and methods of making the anodes are described. The metallic columns can be distinct from one another and project outward from the substrate. Also described is the formation of the metallic columns on the substrate by vapor deposition, including glancing angle deposition (GLAD), and by etching a portion of a metal layer. High capacitance capacitors made from the capacitor anodes are also described.

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