Capacitor and method of manufacturing the same

Details Capacitor and method of manufacturing the same Capacitor and method of manufacturing the same

1993-03-22

1997-10-07

Bowers, Jr., Charles L.

Fishing, trapping, and vermin destroying

437238, 437241, 437228, 437919, H01L 2170

Patent

active

056747713

ABSTRACT:
A structure of a capacitor includes a first metal interconnection layer, a dielectric film, and a second metal interconnection layer. The dielectric film is formed on the first metal interconnection layer. The second metal interconnection layer is formed on the dielectric film. The dielectric film is a dielectric film formed by bias-ECR plasma CVD.

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