Capacitor

Details Capacitor Capacitor

1997-01-15

1998-09-22

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361313, 3613215, 257306, 438396, H01G 406, H01G 420, H01G 412

Patent

active

058123644

ABSTRACT:
An MIM capacitor includes a lower electrode; a first insulating film disposed on the lower electrode; a second insulating film disposed on the first insulating film and having a first opening exposing a portion of the surface of the first insulating film on the lower electrode, the first opening having a perimeter; a third insulating film disposed on the second insulating film and having a second opening exposing a portion of the surface of the second insulating film, the second opening having a perimeter that surrounds the perimeter of the first opening on the second insulating film; and an upper electrode disposed on the first insulating film through the first opening and extending onto the second insulating film.

REFERENCES:
patent: 4635400 (1987-01-01), Brown et al.
patent: 5142639 (1992-08-01), Kohyama et al.
patent: 5349494 (1994-09-01), Ando
patent: 5406447 (1995-04-01), Miyazaki
patent: 5706064 (1998-01-01), Fukunaga et al.
patent: 5731216 (1998-03-01), Holmberg et al.
patent: 5742472 (1998-04-01), Lee et al.
Oku et al., "Influence of Current Injection Into a-SiN:H Films on Charge Trapping Defects", Materials Research Society Symposium Proceedings, vol. 209, 1991, pp. 487-492.

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