Capacitively coupled resonator drive

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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C073S862590

Reexamination Certificate

active

07467553

ABSTRACT:
An apparatus and method for a micro-machined device having a movable mass rotatably suspended from a frame by one or more hinges for rotation relative thereto frame. A DETF resonator is suspended between the frame and reaction mass, and a capacitor is provided between the frame and movable mass for transmitting a drive signal to the DETF resonator.

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Helsel M et al.; A navigation grade micro-machined silicon accelerometer; Position Location and Navigation Symposium, Apr. 11-15, 1994; New York, NY, pp. 51-58.

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