Capacitively coupled micromirror

Details Capacitively coupled micromirror Capacitively coupled micromirror

2005-06-14

2005-06-14

Epps, Georgia (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C345S085000

Reexamination Certificate

active

06906850

ABSTRACT:
A capacitively coupled microelectromechanical device comprising: a semiconductor substrate; a member operable to deflect to either of at least two states; and a switch for selectively connecting the member to a voltage signal. When a logic high signal is stored on memory capacitor, mirror transistor is turned on, grounding the mirror structure. When a logic low signal is stored on the memory capacitor, the mirror transistor is turned off, allowing the mirror to float electrically. Mirrors that are tied to a voltage potential, which typically are grounded, are affected by a reset pulse and rotate away from their landed position. When the mirrors have rotated to the opposite side, a bias signal is applied to hold the repositioned mirror in place in the opposite state. Mirrors that electrically are floating do not experience the forces generated by the reset voltage and remain in their previous state.

REFERENCES:
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patent: 5285407 (1994-02-01), Gale et al.
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patent: 5583688 (1996-12-01), Hornbeck
patent: 5953103 (1999-09-01), Nakamura
patent: 6147790 (2000-11-01), Meier et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6473361 (2002-10-01), Chen et al.
patent: 6480433 (2002-11-01), Huffman
patent: 6525864 (2003-02-01), Gee et al.

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