Capacitive vibration sensor and method for manufacturing same

Details Capacitive vibration sensor and method for manufacturing same Capacitive vibration sensor and method for manufacturing same

2011-03-15

2011-03-15

Ni, Suhan (Department: 2614)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S175000

Reexamination Certificate

active

07907744

ABSTRACT:
A vibration electrode plate112is formed on the upper face of a silicon substrate32with an insulating coat film35interposed in between. An opposing electrode plate113is placed on the vibration electrode plate112with an insulating coat film interposed in between, and acoustic holes40are opened through the opposing electrode plate113. Etching holes36and104, each having a semi-elliptical shape, are opened through the vibration electrode plate112and the opposing electrode plate113so as to face each other longitudinally. A concave section37having a truncated pyramid shape is formed in the upper face of the silicon substrate32, by carrying out an etching process through the etching holes36and104. The vibration electrode plate112is held in the silicon substrate32by a holding portion112placed between the etching holes36.

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