Communications – electrical: acoustic wave systems and devices – Signal transducers – Receivers
Reexamination Certificate
2006-06-28
2009-12-01
Lobo, Ian J (Department: 3662)
Communications, electrical: acoustic wave systems and devices
Signal transducers
Receivers
Reexamination Certificate
active
07626891
ABSTRACT:
A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.
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Jin et al, “The Microfabrication of Capacitive Ultrasonic Transducers”, Journal of Microelectromechanical Systems, vol. 7, No. 3, Sep. 1998.
Ladabaum et al., “Surface Micromachined Capacitive Ultrasonic Transducers”, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, vol. 45, No. 3, May 1998.
Chang Ming-Wei
Chung Zhen-Yuan
Deng Tse-Min
Gwo Tsung-Ju
Alston & Bird LLP
Industrial Technology Research Institute
Lobo Ian J
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