Capacitive type pressure sensor

Details Capacitive type pressure sensor Capacitive type pressure sensor

2005-04-12

2005-04-12

Noori, Max (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

06877383

ABSTRACT:
By sealing a diaphragm with less processes and lower cost and reducing deformation due to remaining stress, a stable and highly reliable pressure sensor construction is proposed. The pressure sensor is low in measurement error and small in floating capacitance and leakage current and good in characteristic. As a means to attain the above object, a polycrystalline silicon diaphragm is sealed with a silicon oxide film deposited through a LPCVD method and then completely covered. The diaphragm is placed on a surface of a semiconductor substrate with a nearly constant gap of 0.15 to 1.3 μm, and has difference-in-grade constructions of a deformation reducing means due to remaining stress.

REFERENCES:
patent: 4766666 (1988-08-01), Sugiyama et al.
patent: 4771638 (1988-09-01), Sugiyama et al.
patent: 4833920 (1989-05-01), Knecht et al.
patent: 4849071 (1989-07-01), Evans et al.
patent: 4903000 (1990-02-01), Yajima et al.
patent: 5167158 (1992-12-01), Kamachi et al.
patent: 5242863 (1993-09-01), Xiang-Zheng et al.
patent: 5316619 (1994-05-01), Mastrangelo
patent: 5335550 (1994-08-01), Satou
patent: 5344523 (1994-09-01), Fung et al.
patent: 5471086 (1995-11-01), Ipposhi et al.
patent: 5668033 (1997-09-01), Ohara et al.
patent: 5801313 (1998-09-01), Horibata et al.
patent: 5996419 (1999-12-01), Sokn
patent: 6109113 (2000-08-01), Chavan et al.
patent: 6653702 (2003-11-01), Ishio et al.
patent: 0 385 574 (1990-09-01), None
patent: 62-232171 (1987-10-01), None
patent: 62-502645 (1987-10-01), None
patent: 63-025982 (1988-02-01), None
patent: 64-013773 (1989-01-01), None
patent: 04-278464 (1992-10-01), None
patent: 06-050986 (1994-02-01), None
patent: 06-252420 (1994-09-01), None
patent: 6-252420 (1994-09-01), None
patent: 8606548 (1986-11-01), None
Dirk De Bruyker et al., “A Combined Piezoresistive/capacitive Pressure Sensor with Self-test Function based on Thermal Actuation”, 66 Sensors and Actuators 1-3, 70-75 (1998).
European Search Report for EP 99 10 5163 (dated Apr. 26, 2001).

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