Capacitive-type acceleration sensor

Details Capacitive-type acceleration sensor Capacitive-type acceleration sensor

2005-08-02

2005-08-02

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S493000

Reexamination Certificate

active

06923060

ABSTRACT:
A capacitive-type acceleration sensor includes a sensor chip that forms a moving electrode and a fixed electrode. The electrodes face each other while maintaining a detection gap. The sensor chip is joined to a circuit chip integrally. The circuit chip is mounted on a package via a resin adhesive. The adhesive is mixed with a filler of a material having a Young's modulus higher than that of the resin.

REFERENCES:
patent: 5150616 (1992-09-01), Kondo et al.
patent: 5483106 (1996-01-01), Echigo et al.
patent: 5686711 (1997-11-01), Yamamoto
patent: 6448624 (2002-09-01), Ishio et al.
patent: 6591678 (2003-07-01), Sakai
patent: A-2001-302924 (2001-10-01), None
patent: A-2002-323514 (2002-11-01), None

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