Capacitive transducer with electrostatic actuation

Details Capacitive transducer with electrostatic actuation Capacitive transducer with electrostatic actuation

1994-11-14

1996-11-19

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

73862626, 3612832, 3612833, 3612834, G01B 528

Patent

active

055764835

ABSTRACT:
High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-plate capacitor transducer system. The transducer may be used for both applying and measuring the applied force during microindentation or micro hardness testing, and for imaging before and after the testing to achieve an atomic force microscope type image of a surface topography before and after indentation testing.

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