Capacitive transducer having guard electrode and buffer amlifyin

Details Capacitive transducer having guard electrode and buffer amlifyin Capacitive transducer having guard electrode and buffer amlifyin

1999-07-08

2000-11-14

Oen, William

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

G01B 716, G01L 2500

Patent

active

061453846

ABSTRACT:
A guard electrode is formed on a frontside surface of a semiconductor substrate and a fixed electrode is formed on the guard electrode via an insulating layer. A cavity is formed on the fixed electrode by a diaphragm and a moving electrode is formed between the layers of the diaphragm. A substrate through hole directing from a backside surface of the substrate and reaching the cavity is formed. An operational amplifier which drives the guard electrode so as to equalize an electric potential of the guard electrode with that of the fixed electrode is provided. A change in the capacitance between the fixed electrode and a moving electrode is converted into a voltage directly concerned with a displacement of the diaphragm.

REFERENCES:
patent: 3417626 (1968-12-01), Riordan
patent: 5381300 (1995-01-01), Thomas et al.
patent: 5459368 (1995-10-01), Onishi et al.
patent: 5646348 (1997-07-01), Greiff et al.
European Search Report dated Oct. 28, 1999.

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