Measuring and testing – Dynamometers – Responsive to force
Patent
1994-08-19
1996-07-02
Chilcot, Richard
Measuring and testing
Dynamometers
Responsive to force
G01C 100
Patent
active
055311288
ABSTRACT:
The invention is related to a capacitive transducer feedback-controlled by means of electrostatic force and a method for controlling said transducer. The transducer comprises a body part (8) supporting a dynamically moving transducing element sensitive to the variable being measured, said transducing element being, e.g., a diaphragm (9) or a reference mass (36) supported by a bending beam (37), said element further being at least on its surface electrically conductive to the end of forming a first electrode (9, 36) of the transducer, and the transducer further comprising at least two second, planar electrodes (5, 6) which are placed on the same side with regard to the transducing element (9, 37). According to the invention, the second electrodes (5, 6) have at least essentially equal effective areas to the end of measuring the profile of the transducing element (9, 37) and controlling the same to an exactly defined geometric state.
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Biegel Ronald
Chilcot Richard
Vaisala Oy
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