Capacitive transducer and method

Electricity: measuring and testing – Conductor identification or location – Inaccessible

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G01R 2726

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active

046367144

ABSTRACT:
An integrated circuit capacitive transducer measures at least one parameter of a medium to which it is exposed. A variable capacitor has a capacitance which varies as a function of the measured parameter and is charged by source of reference potential. The charge on the variable capacitor is then transferred to a second capacitor having a fixed reference capacitance. The voltage developed across the second capacitor by the charge transferred thereto is then a function of the capacitance of the first capacitor. Therefore, the voltage is also a function of the parameter being measured. The capacitance transducer may also include a further variable capacitor for measuring the difference of parameters between two mediums.

REFERENCES:
patent: 2607528 (1952-08-01), McWhirter et al.
patent: 3193803 (1965-07-01), Hoffman
patent: 3858097 (1974-12-01), Polye
patent: 3886447 (1975-05-01), Tanaka
patent: 3952234 (1976-04-01), Birchall
patent: 4153873 (1979-05-01), Grindheim
patent: 4243933 (1981-06-01), Rollman
patent: 4357834 (1982-11-01), Kimura
"A High-Sensitivity Integrated-Circuit Capacitive Pressure Transducer", Wen H. Ko, et al, pp. 48-56, IEEE Transactions on Electron Devices, Jan. 1982, vol. ED-29, No. 1.
"A Monolithic Capacitive Pressure with Pulse-Period Output", IEEE-ED, C. S. Sander, et al, May 1980, pp. 927-930.
C. D. Fung, et al, "Miniature Capacitive Pressure Transducers", Sensors and Actuators, vol. 2, No. 3, Jul. 1982, pp. 321-325.
Dobkin, IC Voltage Reference has 1 PPM Per Degree Drift, Linear Applications, vol. 2, Jun. 1976, pp. AN161-1 to AN161-6.

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