Capacitive transducer

Details Capacitive transducer Capacitive transducer

1984-05-18

1986-03-04

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

338 4, H01G 700, G01L 122

Patent

active

045743274

ABSTRACT:
A capacitive transducer is provided having a plate mounted therein to move in a piston-like manner in a sealed cavity toward and away from a fixed cooperating plate forming the other side of the capacitive circuit. The movable plate is etched in a unique fashion from a single crystal silicon wafer in a batch process forming a plurality of capacitive sensors simultaneously. The movable plate is etched in unique fashion with a plurality of spaced passages, allowing passage of fluid such as air contained in the cavity therethrough, thus damping plate movement by such fluids. The surfaces of the plate are further etched with special grooves to direct fluid flow to the passages. Moreover, a plurality of spaced stops are included in the plate surface during the etching process to overcome both electrostatic latch-up, wherein electrical attraction exceeds membrane restoring force, and pneumatic latch-up, wherein membrane restoring force is inadequate to draw gas between plates in close proximity.

REFERENCES:
patent: 4144516 (1979-03-01), Aine
patent: 4236137 (1980-11-01), Kurtz et al.
patent: 4287772 (1981-09-01), Mounteen
IEEE Transactions on Electron Devices, Jan. 1981, vol. ED-29, No. 1, Lee et al., pp. 42 to 48.
Sensors and Actuators, vol. 4, pp. 191-198, 1983/1984, Rudolf.
Sensors & Systems, 8/1982, Pasadena Zias, pp. 36 to 70.

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