Capacitive temperature and pressure transducer

Details Capacitive temperature and pressure transducer Capacitive temperature and pressure transducer

1995-08-21

1997-09-02

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73718, 73724, G01L 1904, G01L 912

Patent

active

056635060

ABSTRACT:
A monolithic temperature and pressure transducer having a plurality of capacitive sensors. The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients.

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