Capacitive sound transducer

Details Capacitive sound transducer Capacitive sound transducer

1989-03-06

1990-05-01

Kyle, Deborah L.

Communications, electrical: acoustic wave systems and devices

Signal transducers

Receivers

381174, 381175, 381191, 29 2542, H04R 1700

Patent

active

049224719

ABSTRACT:
Capacitive sound transducer of a very small construction, in particular a microphone has at least two joint semiconductor chips, which embody a membrane unit and a fixed counter-electrode structure. The acoustic active portion of the membrane unit 1 with at least one counter-electrode structure 3, which is separated from the membrane unit by means of an air gap, forms a system which is comparable to a field effect transistor. The membrane unit which is formed of a semiconducting ground material encompasses an acoustically active membrane surface (2), one side 5 of which confronts the counter-electrode structure is electrically conductive.
The counter-electrode structure 3 has a semiconductive base material out of which there is machined a channel length which has been limited by a source-drain arrangement, the geometric width measurrement of which is on the order of magnitude of a tenth of the lateral measurement of the active membrane surface.

REFERENCES:
patent: 3624315 (1971-11-01), Broce
patent: 3835264 (1974-09-01), Overby
patent: 4524247 (1985-06-01), Lindenberger et al.
patent: 4533795 (1985-08-01), Baumhauer, Jr. et al.
patent: 4558184 (1985-12-01), Busch-Vishniac et al.
patent: 4691363 (1987-09-01), Khanna

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