Capacitive sensor and method of fabricating

Details Capacitive sensor and method of fabricating Capacitive sensor and method of fabricating

2008-07-22

2008-07-22

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C257S737000

Reexamination Certificate

active

11353358

ABSTRACT:
A capacitive sensor and a method of making it with a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap; a plurality of conductor elements interconnecting the substrate and fixed plate; and an edge lock supporting the fixed plate and the substrate relative to each other for maintaining the dimension of the defined gap independent of the conductor elements.

REFERENCES:
patent: 5933317 (1999-08-01), Moncrieff
patent: 6441449 (2002-08-01), Xu et al.
patent: 2002/0025595 (2002-02-01), Xu et al.
patent: 2003/0095371 (2003-05-01), Cheung
patent: 2005/0229710 (2005-10-01), O'Dowd et al.
patent: 2006/0163726 (2006-07-01), Kierse et al.
patent: 2006/0191351 (2006-08-01), Meehan et al.

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