Capacitive sensor

Details Capacitive sensor Capacitive sensor

2008-04-08

2008-04-08

Allen, Anore J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000, C073S753000

Reexamination Certificate

active

10914909

ABSTRACT:
A capacitive sensor including a housing having a hermetically sealed cavity, a plate in the cavity, a diaphragm forming a part of the cavity and spaced from the plate, a conductive layer on the first diaphragm, and a second conductive layer on the plate, the first and second conductive layers being the electrodes of a capacitor whose capacitance varies with the position of the diaphragm relative to the plate.

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patent: 2005/0030724 (2005-02-01), Ryhanen et al.
patent: 2002039893 (2002-02-01), None

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