Capacitive sensor

Details Capacitive sensor Capacitive sensor

1996-05-24

1998-09-01

Chapman, John E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73724, 7351432, 3612834, G01L 912, G01P 15125

Patent

active

058013130

ABSTRACT:
To provide a capacitive sensor which produces a sensor output excellent in linearity. The capacitive sensor comprises a first semiconductor substrate and a second substrate. The first semiconductor substrate is formed with a frame portion and a diaphragm portion serving as a movable electrode, and bonded with the second substrate at the upper surface of the frame portion by anodic bonding. The second substrate is provided with a fixed electrode on a surface facing the diaphragm portion. A fixing projection is provided on a center of the diaphragm portion and is fixed to the second substrate through a hole of the fixed electrode. When external force is applied to the sensor, the diaphragm portion displaces upward and/or downward. The external force is detected based on change of electrostatic capacitance. Since the center of the diaphragm portion is fixed by the fixing projection, the maximum displacement region of the diaphragm portion forms a ring, resulting in enhancement of linearity of the sensor output.

REFERENCES:
patent: 4336567 (1982-06-01), Anastasia
patent: 4691575 (1987-09-01), Sonderegger et al.
patent: 4949581 (1990-08-01), Rud
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5209118 (1993-05-01), Jerman
patent: 5441300 (1995-08-01), Yokota et al.

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