Capacitive sensing cell made of brittle material

Electricity: electrical systems and devices – Electrostatic capacitors – Variable

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73724, H01G 700, G01L 912

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active

046033718

ABSTRACT:
A pressure sensing cell construction comprises a pair of plates which are joined together around the periphery, to form a first chamber. A second chamber, preferably identically constructed to the first chamber is connected to the first chamber through a conduit. The chambers and the conduit are filled with noncompressible liquid, so that when pressure acts on the outer surfaces of the plates, at least one plate deflects and the liquid in one chamber will tend to be squeezed out into the other chamber, and by measuring the spacing between the plates the pressure sensed can be determined. The plates preferably are made of a brittle material so that pressures can be determined with high accuracy. The plates forming the chamber subjected to the higher pressure will contact each other as a positive stop to limit the amount of deflection of the plates forming the other chamber as the fluid causes such other chamber to expand under high overpressures on the plates of the chamber subjected to higher pressure. Thus, the device will withstand this high overpressure without damage, even though it is constructed of brittle materials.

REFERENCES:
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Behr, M. and J. Giachino, A Miniature Pressure Sensor for Automotive Applications, I Mech E. Conference Publications 1981-10 (1981), presented at The Third International Conference on Automotive Electronics at London in Oct. 1981.

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