Capacitive pressure transducer with reference capacitor

Details Capacitive pressure transducer with reference capacitor Capacitive pressure transducer with reference capacitor

1996-11-25

1998-06-02

Oen, William L.

Measuring and testing

Fluid pressure gauge

Diaphragm

72718, G01L 912

Patent

active

057603111

ABSTRACT:
A capacitive pressure transducer comprising a first capacitor having a plate which is movable under the influence of pressure and a fixed plate, and a second capacitor having a pair of fixed plates, one plate of the second capacitor and the fixed plate of the first capacitor being fixed to a common support, a first structure for moving the movable plate, a support structure for a second plate of the second capacitor, masses of the support structure for the second plate and of the first structure for moving the movable plate being approximately equal.

REFERENCES:
patent: 3354721 (1967-11-01), Fiske
patent: 4572000 (1986-02-01), Kooiman
patent: 4603371 (1986-07-01), Frick
patent: 4612812 (1986-09-01), Broden
patent: 4680971 (1987-07-01), Kavli et al.
patent: 4689999 (1987-09-01), Shkedi
patent: 4691574 (1987-09-01), Delatorre
patent: 4730496 (1988-03-01), Knecht

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