Capacitive pressure transducer with an integrally formed front h

Details Capacitive pressure transducer with an integrally formed front h Capacitive pressure transducer with an integrally formed front h

1996-03-28

1997-08-12

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 3612834, G01L 912

Patent

active

056567804

ABSTRACT:
A simplified capacitive pressure transducer includes a conductive surface, a portion of which is a surface of a flexible diaphragm in direct contact with a pressure to be measured, and an insulating substrate defining a plurality of capacitor electrodes sized to accommodate the measurement of pressures within a particular pressure range. The pressure transducer includes a front housing and a rear housing which are fitted together to provide a transducer chamber within which a hybrid circuit is secured. The insulating substrate includes a reference capacitor electrode, a variable capacitor electrode and vias. The insulating substrate is mechanically coupled to the front housing such that the conductive surface of the front housing and the reference capacitor electrode form a reference capacitor, and the conductive surface and the variable capacitor electrode form a variable capacitor. The reference capacitor electrode and the variable capacitor electrode are electrically connected to the hybrid circuit through the vias.

REFERENCES:
patent: 4398426 (1983-08-01), Park et al.
patent: 4617607 (1986-10-01), Park et al.
patent: 5060108 (1991-10-01), Baker et al.
patent: 5233875 (1993-08-01), Obermeier et al.
patent: 5329819 (1994-07-01), Park et al.

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