Capacitive pressure transducer structure with a sealed vacuum ch

Details Capacitive pressure transducer structure with a sealed vacuum ch Capacitive pressure transducer structure with a sealed vacuum ch

1996-04-30

1997-08-12

Dombroske, George M.

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 3612834, G01L 912

Patent

active

056567812

ABSTRACT:
A capacitive pressure transducer structure and a method for manufacturing the same comprises a transducer structure having a contiguous diaphragm structure (2), which at least in some parts is conducting to the end of forming a first electrode (4) of a transducing capacitor, a substrate (3) which is permanently bonded to a first surface of the diaphragm structure (2) and comprises a second electrode (5) of the transducing capacitor, spaced at a distance from and aligned essentially at the first electrode (4), and a silicon structure (1), which is permanently bonded to a second surface of the diaphragm structure (2), incorporating a space (21) suited to accommodate the deflection of the first electrode (4). The angle .alpha. formed between vertical walls (11) of the space (21) and the first electrode (4) is smaller than or equal to 90.degree., and the material surrounding the space (21) is silicon or doped silicon.

REFERENCES:
patent: 3288656 (1966-11-01), Nakamura
patent: 3397278 (1968-08-01), Pomerantz
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4332000 (1982-05-01), Petersen
patent: 4386453 (1983-06-01), Giachino et al.
patent: 4390925 (1983-06-01), Freud
patent: 4589054 (1986-05-01), Kuisma
patent: 4594639 (1986-06-01), Kuisma
patent: 4625561 (1986-12-01), Mikkor
patent: 4628403 (1986-12-01), Kuisma
patent: 4951174 (1990-08-01), Grantham et al.
patent: 5349492 (1994-09-01), Kimura et al.

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