Capacitive pressure transducer having reduced output error

Details Capacitive pressure transducer having reduced output error Capacitive pressure transducer having reduced output error

1998-04-27

1999-09-28

Noori, Max

Measuring and testing

Fluid pressure gauge

Diaphragm

3612834, G01L 912, H01G 700

Patent

active

059592125

ABSTRACT:
A fluid pressure sensor (10) having a capacitive pressure transducer (12) having a thin, relatively flexible ceramic diaphragm (14) mounted in closely spaced apart relation to a rigid ceramic substrate (16) by a glass annulus (18) mounted in a housing (46) having a port (46a) for fluid whose pressure is to be sensed to be received on an outer face of the diaphragm. An electronic circuit (50) is mounted in a chamber (38) formed between a connector (36) and an outer face (12b) of the substrate. A source capacitor plate (20) and source trace (20b) are printed on the diaphragm and a detect plate (22) and detect trace (22b) are printed on a substrate with a guard plate (28, 28', 28"; 30, 30") printed on both the diaphragm and substrate completely surrounding the source and detect plates and traces.

REFERENCES:
patent: 4158217 (1979-06-01), Bell
patent: 4207604 (1980-06-01), Bell
patent: 4426673 (1984-01-01), Bell et al.
patent: 4716492 (1987-12-01), Charboneau et al.
patent: 4875135 (1989-10-01), Bishop et al.
patent: 5436795 (1995-07-01), Bishop et al.
patent: 5656780 (1997-08-01), Park

Affiliated with

Also associated with

Rating

Capacitive pressure transducer having reduced output error does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive pressure transducer having reduced output error, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive pressure transducer having reduced output error will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-705550