Capacitive pressure transducer

Details Capacitive pressure transducer Capacitive pressure transducer

1977-11-10

1979-09-18

Goldberg, E. A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, H01G 700

Patent

active

041685172

ABSTRACT:
A pressure-sensing transducer and method of construction therefor. The device includes a dielectric plate joined to the periphery of a diaphragm and having a central portion with conductive film which serves as a capacitor plate and faces the diaphragm which forms the other capacitor plate. A deep convolution formed near the rim of the diaphragm provides a relatively rigid ring-shaped structure in comparison to the relatively flexible central portion of the diaphragm. As the central portion deflects under pressure, the rigid convolution serves to prevent the motion from being transmitted to the outer rim of the diaphragm and thus to minimize hysteresis. The device further includes a relatively thin annular structure against which the dielectric plate and diaphragm are clamped directly or through the use of a clamping collar. The conductive film and diaphragm are connected to exterior terminals.

REFERENCES:
patent: 2667786 (1954-02-01), Spaulding
patent: 3703828 (1972-11-01), Bullard
patent: 3965746 (1976-06-01), Rabek
patent: 4040118 (1977-08-01), Johnston

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