Capacitive pressure transducer

Details Capacitive pressure transducer Capacitive pressure transducer

1978-11-20

1980-04-15

Goldberg, E. A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

361278, H01G 700, G01L 912

Patent

active

041986709

ABSTRACT:
A variable capacitor includes a metal diaphragm arranged to flex in response to an applied pressure differential serving as a movable capacitor plate and a fixed capacitor plate closely spaced from the diaphragm. At least one of the two capacitor plates has an insulating layer of metal oxide formed thereon to prevent electrical contact therebetween. By making the capacitor plate of an iron-chrome-aluminum alloy and heating the capacitor plate, an aluminum oxide layer is formed thereon. The fixed capacitor plate is formed in a hat-shaped configuration with the brim portion spaced far from the diaphragm by an insulating spacer to minimize the fixed capacitance around the edge of the capacitor assembly.

REFERENCES:
patent: 2667786 (1954-02-01), Spaulding
patent: 2808545 (1957-10-01), Hirtreiter
patent: 3027769 (1962-04-01), Coon
patent: 3697835 (1972-10-01), Satori

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