Capacitive pressure transducer

Details Capacitive pressure transducer Capacitive pressure transducer

1988-05-04

1989-08-29

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 516, G01L 912

Patent

active

048623172

ABSTRACT:
A capacitive pressure transducer includes a capacitive sensor structure, a case into which the capacitive sensor structure is adapted, channels formed in the case for introducing a measured medium into the capacitive sensor structure, and electrical conductors to make the pressure-related capacitive sensor information externally available. According to the invention, the capacitive sensor structure is fixed to the case by means of elastic structures, which elastic structures provide a floating support for the capacitive sensor structure adapted between the elastic structures. The construction in accordance with the invention cancels errors caused by temperature variations.

REFERENCES:
patent: 2808545 (1957-10-01), Hirtreiter et al.
patent: 3397278 (1968-08-01), Pomerantz
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4301492 (1981-11-01), Paquin et al.
patent: 4542435 (1985-09-01), Freud et al.
patent: 4589054 (1986-05-01), Kuisma
patent: 4597027 (1986-06-01), Lehto
patent: 4599906 (1986-07-01), Freud et al.
patent: 4609966 (1986-09-01), Kuisma
patent: 4628403 (1986-09-01), Kuisma
patent: 4691575 (1987-09-01), Sonderegger et al.
patent: 4769738 (1988-09-01), Nakamura et al.

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