Capacitive pressure transducer

Details Capacitive pressure transducer Capacitive pressure transducer

1980-06-06

1981-09-01

Goldberg, E. A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

65 43, 73724, H01G 700

Patent

active

042875536

ABSTRACT:
A capacitive pressure transducer having a first flexible electrically insulative diaphragm disposed apart from a second electrically insulative member, including a second flexible diaphragm, and where the diaphragm and member include metalized portions thereon forming the plates of a pressure sensing capacitor.
The transducer further includes a pair of electrically insulative sealing rings disposed concentrically about one another which function to space said diaphragm and member apart and which form a hermetically sealed cavity therebetween, to establish the pressure sensitive region of the diaphragm and to reduce the tensile forces in the inner most sealing ring.

REFERENCES:
patent: 4168518 (1979-09-01), Lee
patent: 4177496 (1979-12-01), Bell
patent: 4184189 (1980-01-01), Davis

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