Capacitive pressure sensor with third encircling plate

Details Capacitive pressure sensor with third encircling plate Capacitive pressure sensor with third encircling plate

1988-12-30

1990-08-21

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, H01G 700

Patent

active

049511742

ABSTRACT:
A pressure sensor (210) utilizing capacitance variations to sense pressure variations of the silicon-glass-silicon type (FIG. 3) including a conductive silicon substrate (212), a conductive silicon diaphragm (211) and a glass dielectric layer (213) therebetween forming a spacing wall (216) between them, in which dielectric drift and parasitic (non-pressure sensitive) capacitance is minimized by including a very thin, third, symmetrical, silicon, capacitive plate (220) in the glass wall (216). The third conductive plate encircles the central region (Cc) of the sensor and is located outside of it. Improved assembly techniques, including all symmetrical planar layers, for higher manufacturing yield and better long term reliability are also disclosed.

REFERENCES:
patent: 3858097 (1974-12-01), Polye
patent: 4289035 (1981-09-01), Lee
patent: 4405970 (1983-09-01), Swindal et al.
patent: 4463336 (1984-07-01), Black et al.
patent: 4530029 (1985-07-01), Beristain

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