Capacitive pressure sensor with sensing element mechanically iso

Details Capacitive pressure sensor with sensing element mechanically iso Capacitive pressure sensor with sensing element mechanically iso

1997-09-15

1998-05-12

Oen, William L.

Measuring and testing

Fluid pressure gauge

Mounting and connection

73706, G01L 700, G01L 708

Patent

active

057508992

ABSTRACT:
To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).

REFERENCES:
patent: 4898035 (1990-02-01), Yajima et al.
patent: 5212989 (1993-05-01), Kodama et al.
patent: 5317921 (1994-06-01), Kremidas
patent: 5392653 (1995-02-01), Zanger et al.
patent: 5665921 (1997-09-01), Gerst et al.

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