Capacitive pressure sensor with sealed reference chamber

Details Capacitive pressure sensor with sealed reference chamber Capacitive pressure sensor with sealed reference chamber

2007-05-03

2008-12-09

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S718000, C073S754000, C361S283100

Reexamination Certificate

active

07461558

ABSTRACT:
A capacitive pressure sensor includes a substrate assembly. The substrate assembly includes a conductive layer and defines a plurality of channels terminating in closed ends. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber including the channels is defined by the conductive membrane and the substrate assembly. A cap is mounted relative to the substrate assembly and defines one or more apertures so that an antechamber is defined by the cap and the conductive membrane. Differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and conductive layer.

REFERENCES:
patent: 4572000 (1986-02-01), Kooiman
patent: 4578735 (1986-03-01), Knecht et al.
patent: 4586109 (1986-04-01), Peters et al.
patent: 4864463 (1989-09-01), Shkedi et al.
patent: 5062302 (1991-11-01), Petersen et al.
patent: 5186055 (1993-02-01), Kovacich et al.
patent: 5289721 (1994-03-01), Tanizawa et al.
patent: 5295395 (1994-03-01), Hocker et al.
patent: 5442962 (1995-08-01), Lee
patent: 5519179 (1996-05-01), Sato
patent: 5853020 (1998-12-01), Widner
patent: 5959213 (1999-09-01), Ikeda et al.
patent: 6058780 (2000-05-01), Bernot et al.
patent: 6295875 (2001-10-01), Frick et al.
patent: 6405132 (2002-06-01), Breed et al.
patent: 6431003 (2002-08-01), Stark et al.
patent: 6465271 (2002-10-01), Ko et al.
patent: 6484080 (2002-11-01), Breed et al.
patent: 6526352 (2003-02-01), Breed et al.
patent: 6533316 (2003-03-01), Breed et al.
patent: 6640642 (2003-11-01), Onose et al.
patent: 6647794 (2003-11-01), Nelson et al.
patent: 6648367 (2003-11-01), Breed et al.
patent: 6662642 (2003-12-01), Breed et al.
patent: 6733036 (2004-05-01), Breed et al.
patent: 6738697 (2004-05-01), Breed
patent: 6741169 (2004-05-01), Magiawala et al.
patent: 6758089 (2004-07-01), Breed et al.
patent: 6768944 (2004-07-01), Breed et al.
patent: 6892582 (2005-05-01), Satou et al.
patent: 6959608 (2005-11-01), Bly et al.
patent: 7181975 (2007-02-01), Bradley et al.
patent: 7353711 (2008-04-01), O'Dowd et al.
patent: 0261972 (1988-03-01), None
patent: 0756164 (1997-01-01), None
patent: WO 03/106952 (2003-12-01), None

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