Capacitive pressure sensor with reference chamber

Details Capacitive pressure sensor with reference chamber Capacitive pressure sensor with reference chamber

2007-06-17

2008-10-07

Allen, Andre J. (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

C073S715000, C073S716000, C073S718000, C073S724000, C073S753000, C073S754000

Reexamination Certificate

active

07430919

ABSTRACT:
A capacitive pressure sensor includes a substrate assembly having a conductive layer. A conductive membrane is mounted to the substrate assembly so that a sealed reference chamber is defined by the conductive membrane and the substrate assembly. A cap is arranged on the substrate assembly and defines one or more apertures so that an antechamber is defined between the cap and the conductive membrane. Differential pressure between the reference chamber and antechamber can cause deflection of the conductive membrane which, in turn, varies the capacitance between the conductive membrane and the conductive layer.

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