Capacitive pressure sensor with low parasitic capacitance

Details Capacitive pressure sensor with low parasitic capacitance Capacitive pressure sensor with low parasitic capacitance

1984-03-12

1985-07-16

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2542, 73718, H01G 700

Patent

active

045300291

ABSTRACT:
A plurality of two-plate capacitive pressure sensors with low parasitic capacitance and easily accessible plates are made with microcircuit and thin film technology by depositing a thin layer of glass over a plurality of thin, rigid plates and thin, narrow electrodes previously deposited on a thick glass dielectric substrate, by etching cavities in the thin layer of glass over the plates, and by anodically bonding, in vacuum, thin, doped silicon diaphragms to the thin layer of glass to form variable capacitors each of whose capacitance varies with the pressure outside the sensor.

REFERENCES:
patent: 3292059 (1966-12-01), Woods
patent: 4292659 (1981-09-01), Lao
patent: 4388668 (1983-06-01), Bell et al.

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