Capacitive pressure sensor housing having a ceramic base

Details Capacitive pressure sensor housing having a ceramic base Capacitive pressure sensor housing having a ceramic base

1997-12-05

2000-05-09

Felber, Joseph L.

Measuring and testing

Fluid pressure gauge

Diaphragm

3612834, G01L 912

Patent

active

060587806

ABSTRACT:
A capacitive pressure sensor capsule has a housing with a ceramic cover sealingly attached to a ceramic base that defines an interior chamber. The sensing medium enters the chamber through an inlet port. A glass sensor is attached to an integral pillar that extends from the housing into the chamber. A conducting member extends through the pillar into the housing and carries the signals from the sensor. The combination of the glass sensor and ceramic housing provides high accuracy over a wide range of temperature, because the thermal coefficient of expansion of glass and ceramic are similar. Hermetic sealing of the sensor electrical circuitry ensures long term immunity from the sensed environment.

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