Capacitive pressure sensor having a substrate with a curved mesa

Details Capacitive pressure sensor having a substrate with a curved mesa Capacitive pressure sensor having a substrate with a curved mesa

1994-01-28

1995-01-10

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, 73724, 29 2542, H01G 700

Patent

active

053812999

ABSTRACT:
A silicon capacitive pressure sensor is disclosed having a silicon substrate and a silicon diaphragm separated by a glass dielectric spacer. The substrate has an upper surface formed as a mesa which is generally curved in shape, the curvature being concave. Due to manufacturing constraints the mesa upper surface comprises a series of concentric rings that approximate the desired concave shape. The step height and diameter of the rings are such that, at full deflection of the diaphragm, the diaphragm touches the center of the mesa, but not the edges of the individual steps. That is, letting the edges or corners of the steps define a curve, the radius of curvature of the diaphragm is smaller than the radius of curvature of the locus of the step corners.

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