Capacitive pressure sensor and reference with stress isolating p

Details Capacitive pressure sensor and reference with stress isolating p Capacitive pressure sensor and reference with stress isolating p

1995-06-06

1996-05-14

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73718, 73756, G01L 912

Patent

active

055157327

ABSTRACT:
A pedestal mount capacitive pressure sensor (10) is supported in a housing (11) and used to sense fluid pressures to provide air pressure data relating to the performance of air vehicles. The capacitive sensor uses a thick base plate (40) on which a diaphragm (48) is mounted. A capacitive electrode (52) is mounted to the diaphragm and pressure deflects the diaphragm to provide an output. The pressure sensor (10) is mounted in an outer housing (11) using a stress isolating pedestal (20).

REFERENCES:
patent: 3660632 (1972-05-01), Leinkram
patent: 4019388 (1977-04-01), Hall, II et al.
patent: 4168630 (1979-09-01), Shirouzu et al.
patent: 4345299 (1982-08-01), Ho
patent: 4384899 (1983-05-01), Myers
patent: 4499774 (1985-02-01), Tsuchiya et al.
patent: 4542435 (1985-09-01), Freud et al.
patent: 4586109 (1986-04-01), Peters et al.
patent: 4617606 (1986-10-01), Shak et al.
patent: 4730496 (1988-03-01), Knecht et al.
patent: 4764747 (1988-08-01), Kurtz et al.
patent: 4918992 (1990-04-01), Mathias
patent: 4930929 (1990-06-01), Maglic
patent: 4970898 (1990-11-01), Walish et al.
patent: 5186055 (1993-02-01), Kovacich et al.
A New Integrated Capacitive Pressure Sensor With Frequency Modulated Output, A. Hanneborg, T. E. Hansen, P. A. Ohlckers, E. Carlson, B. Dahl and O. Holwech, pp. 186-188.

Affiliated with

Also associated with

Rating

Capacitive pressure sensor and reference with stress isolating p does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive pressure sensor and reference with stress isolating p, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive pressure sensor and reference with stress isolating p will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1889522