Capacitive pressure sensor and method of manufacturing the same

Details Capacitive pressure sensor and method of manufacturing the same Capacitive pressure sensor and method of manufacturing the same

2006-11-10

2008-03-18

Thomas, Eric (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C073S718000

Reexamination Certificate

active

07345867

ABSTRACT:
A capacitive pressure sensor and method of manufacturing the same is provided. The capactive pressure sensor includes a glass substrate that has a pair of surfaces opposite to each other. A recessed portion is provided to form a cavity on one of the pair of principal surfaces. A first protruding portion provided in the recessed portion. A first silicon substrate has a fixed electrode formed on the first protruding portion, and a movable electrode disposed with a predetermined interval between the fixed electrode and the movable electrode.

REFERENCES:
patent: 5545594 (1996-08-01), Cahill
patent: 5656781 (1997-08-01), Kankkunen
patent: 5801313 (1998-09-01), Horibata et al.
patent: 7002787 (2006-02-01), Nakayama
patent: 2003/0223176 (2003-12-01), Fujii et al.
patent: 277211 (1998-04-01), None
patent: 2000-74768 (2000-03-01), None

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