Capacitive pressure sensor and method of manufacturing the same

Details Capacitive pressure sensor and method of manufacturing the same Capacitive pressure sensor and method of manufacturing the same

1991-10-04

1993-05-18

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

29 2541, 73718, 361283, G01L 708, G01L 912

Patent

active

052110583

ABSTRACT:
According to a capacitive pressure sensor and a method of manufacturing the same, first and second grooves are formed in one and the other surfaces of a substrate, respectively. A sacrificial layer is embedded in the first groove. Insulating films are formed on the substrate, on which the sacrificial layer is formed, to sandwich an electrode. Etching is performed to form a pressure introducing hole through the substrate to reach the sacrificial layer. A hollow portion is formed by removing the sacrificial layer through the pressure introducing hole.

REFERENCES:
patent: 4445384 (1984-05-01), Royer

Affiliated with

Also associated with

Rating

Capacitive pressure sensor and method of manufacturing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive pressure sensor and method of manufacturing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive pressure sensor and method of manufacturing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-797581