Capacitive pressure sensor and method of manufacturing same

Details Capacitive pressure sensor and method of manufacturing same Capacitive pressure sensor and method of manufacturing same

1990-03-23

1991-03-19

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2542, 73718, H01G 700, G01L 912

Patent

active

050015958

ABSTRACT:
The capacitive pressure sensor (10) has two disks (11, 12) of alumina which are joined together around the periphery in a defined spaced relationship and parallel to each other, forming a chamber (14). At least one of the two disks (11) is designed as an elastic diaphragm. A pure nickel coating (16, 18) is applied to the surface of each disk by electroless deposition from an aqueous solution, and on the surfaces of the two disks facing each other, capacitor electrodes (17, 20, 21) are formed by patterning the nickel coating. The capacitor electrodes are connected to an electronic circuit disposed outside the chamber (14) by additional nickel coatings which are formed in plated-through holes (30, 31, 32) simultaneously with the deposition of the pure nickel coating.

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patent: 4490773 (1984-12-01), Moffatt
patent: 4531415 (1985-07-01), Orlowski et al.
patent: 4752858 (1988-06-01), Yokotani et al.

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