Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1990-03-20
1991-09-17
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
29 2542, 73718, H01G 700, H01G 516, H01G 412
Patent
active
050500350
ABSTRACT:
This rugged, temperature-shock-insensitive, and low-cost pressure sensor (1) has a diaphragm (2) and a substrate (3) which are alumina-ceramic parts, preferably with a purity of 96%, are joined together in a defined spaced relationship and parallel to each other by means of an intermediate layer, forming a, preferably closed, chamber, and have flat inner surfaces which are provided with at least one conductive layer for forming at least one capacitor and are electrically connected to the respective rear side of the diaphragm or substrate via through-hole coatings. For the conductive layers (6, 7, 8), the through-hole coatings (12, 13, 14), and the intermediate layer (5), use is made of a conductive paste or a resistive paste with a sheet resistivity not higher than 1 ohm/square, which are applied using silk-screening techniques.
REFERENCES:
patent: 3376376 (1968-04-01), Smith
patent: 3405559 (1968-10-01), Moffatt
patent: 3609482 (1971-09-01), Edelman et al.
patent: 3634727 (1972-01-01), Polye
patent: 3748571 (1973-07-01), Kurtz
patent: 3858097 (1974-12-01), Polye
patent: 3993939 (1976-11-01), Slavin et al.
patent: 4064550 (1977-12-01), Dias et al.
patent: 4168518 (1979-09-01), Lee
patent: 4177496 (1979-12-01), Bell et al.
patent: 4184189 (1980-01-01), Davis et al.
patent: 4345299 (1982-08-01), Ho
patent: 4388668 (1983-06-01), Bell et al.
patent: 4424713 (1984-01-01), Kroninger, Jr. et al.
patent: 4426673 (1984-01-01), Bell et al.
patent: 4528613 (1985-07-01), Stetson et al.
patent: 4542436 (1985-09-01), Carusillo
patent: 4581676 (1986-04-01), Baxter et al.
Philips Tech. Rev. 43, No. 4, pp. 86-93, Feb. 1987, V. Graeger, R. Kobs and M. Liehr, West Germany, "A Ceramic Differential-Pressure Transducer".
Frank Manfred
Hegner Frank
Endress u. Hauser GmbH u. Co.
Griffin Donald A.
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