Capacitive pressure sensor and method of making it

Details Capacitive pressure sensor and method of making it Capacitive pressure sensor and method of making it

1978-08-14

1980-01-15

Kellogg, Arthur D.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

65 42, 65 43, 65 59A, 73718, C03B 2320

Patent

active

041841891

ABSTRACT:
An inexpensive glass capacitive pressure sensor. Conductive capacitor electrodes are disposed on two flat glass plates, one serving as a diaphragm, the other as a substrate. The electrodes are positioned in a spaced apart, substantially parallel relationship to form the plates of a parallel plate capacitor. The glass plates are sealed together with a sealing glass mixture to bound a volume between the conductors. The volume is at a reference pressure, preferably a substantial vacuum. Differences between the pressure to be measured and this reference pressure cause a flexing of the glass diaphragm which is detected by measuring the capacitance between the two electrodes. A suitable sealing glass mixture which provides a hermetic seal between the glass plates is comprised of, in weight percent, 8-10 SiO.sub.2, 1-2 Al.sub.2 O.sub.3, 55-60 PbO, 7-9 PbF.sub.2, 7-10 ZnO, 4-6 CdO, and 10-15 B.sub.2 O.sub.3. The sealing glass mixture must be vacuum fined to permit hermetic sealing within a vacuum.

REFERENCES:
patent: 3195028 (1965-07-01), Werner et al.
patent: 3367760 (1968-02-01), Bendig et al.
patent: 3778242 (1973-12-01), Francel et al.
patent: 3907535 (1975-09-01), Muller

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