Capacitive pressure sensor and method for making the same

Measuring and testing – Fluid pressure gauge – Diaphragm

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G01L 912

Patent

active

056000723

ABSTRACT:
A sensor (44) having all electrical connection formed on one of the sensor's sides. A first substrate (10) operably attached to a second substrate (32) where the second substrate includes at least one feedthrough hole (22). A first electrical connection (36) is formed on the first substrate (10) through the feedthrough hole (22). A second electrical connection (38) is formed on the second substrate (32) such that the first and second electrical connections (36, 38) are formed on the same side of the sensor (44). An electrical insulator (26) is disposed between the second substrate (32) and the first electrical connection (36) to electrically isolate the first electrical connection (36) from the second substrate (32).

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patent: 4432007 (1984-02-01), Cady
patent: 4773972 (1988-09-01), Mikkor
patent: 4838088 (1989-06-01), Murakami
patent: 4864463 (1989-09-01), Shkedi et al.
patent: 5001595 (1991-03-01), Dittrich et al.
patent: 5186054 (1993-02-01), Sekimura
patent: 5258650 (1993-11-01), Polak et al.
patent: 5323656 (1994-06-01), Fung et al.

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