Capacitive pressure sensor and its manufacturing method

Details Capacitive pressure sensor and its manufacturing method Capacitive pressure sensor and its manufacturing method

2005-09-27

2005-09-27

Oen, William (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S724000

Reexamination Certificate

active

06948374

ABSTRACT:
A capacitive pressure sensor and its manufacturing method can simplify the alignment and the bonding process in a vacuum, and stably carry out the bonding process. The capacitive pressure sensor includes an insulating, first substrate with a capacitance electrode, a second substrate which has a diaphragm electrode so as to separate a vacuum chamber and a pressure-measuring chamber on respective surfaces, and an insulating, third substrate with a gas inlet. The substrates are bonded in a manner that the capacitance electrode faces the diaphragm electrode and the pressure-measuring chamber leads to the gas inlet. In addition, a getter chamber is formed in the same surface of the second substrate as the pressure-measuring chamber, and the getter chamber is connected to the vacuum chamber.

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